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Technology

  • Technology

Cathode

Magnetron cathode is a core module in the sputter system,
maximizing the efficiency and productivity of targets through the cathode's optimized magnetron design.
CNI Technology performs magnet design, magnetic field simulation,
and structural analysis to provide optimal magnetron cathode solutions required by customers.

아이콘
Magenetic field analysis

Magnetic field analysis is the core technology for magnetron cathodes.
We developed the optimal magnetron design technology
according to the target materials and processes based on our long experience and B-field simulation technology.
We were able to secure a target erosion efficiency of more than 50% by using specialized magnet design technology.

  • Conventional technology

    20%

  • lmproved technology

    40%

  • Oprimized technology

    60%
아이콘
Optimized Design

Our cathodes are applied with optimal design key elements for the convenience and stable operation of our customers.

아이콘
Target utilization

The CMC-RT series cathode guarantees high-efficiency sputtering with erosion efficiency of 85% or more utilizing a cylindrical target.

  • 예시이미지

    Full-erosion cylindrical target

  • 예시이미지

    Full-erosion cylindrical target