In-line system
Based on differentiated technology, CNI Technology had successfully led the project related to vacuum automation systems.
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- Mask stocker
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Mask stocker is a chamber that stores metal masks in
the 8th-generation OLED process.
It is configured with mask cassette, up/down module, and forward/backward roller module.
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- Buffer chamber
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Buffer chamber is a chamber that controls the gap between substrates
during the transfer of 8th-generation OLED substrates.
It increases the efficiency of using deposition materials
by reducing the gap between the substrates as much as possible and controlling it precisely.
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- Load lock
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The 8th-generation load lock is applied with fast pumping
and vent, low-particle generation technology.
As for driving rollers, the chamber volume has been reduced as much as possible
through the use of a ferro-seal direct connection type.
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- Glass flipper
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It is a chamber that reverses the glass to face up or down,
and it is possible to pre-heat or cool the glass at the same time.
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- Carrier elevator
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Carrier elevator is an equipment that interfaces with AGV/MGV and puts the carrier into a vacuum chamber.
It is configured with an up/down module and a sliding module.
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- Liner Buffer
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Linear buffer is an equipment developed to allow transfer
from a cluster tool to an in-line equipment.
It consists of a top linear stage, a bottom linear stage,
an up/down module, and an aligner.
