ShieldRus-1200
ShieldRus-1200是在半导体封装上利用溅镀方式形成电磁波屏蔽的设备，专门为量产系统设计。
主要特点
- 利用Cubicle in-line方式构成紧凑型设计
- 保障高速生产能力
- 方便维保
- 低温控制技术
| Item | ShieldRus-1200 | ShieldRus-1200s | ShieldRus-300H |
|---|---|---|---|
| 3D drawing |
|
|
|
| Tact Time | 6 min(3.5 um at top) | 6 min(3.5 um at top) | 30 min(3.5 um at top) |
| Cooling Type | Active cooling | Active cooling | Active cooling |
| Temperature | < 120℃ (with MF-Seal & Pi tape) | < 120℃ (with MF-Seal & Pi tape) | < 120℃ (with MF-Seal & Pi tape) |
| PKG Handling Material | PI tape and MF-Seal | PI tape and MF-Seal | PI tape and MF-Seal |
| UPH | Ø300 Standard ring frame 40ea | Ø300 Standard ring frame 10ea | Ø300 Standard ring frame 2ea |
