VACUUM AUTOMATION SYSTEM

끊임없는 열정으로 항상 발전하는 씨앤아이테크놀로지가 되겠습니다.

Platform is the tool to transfer board to process chamber in the atmosphere. It transfers the board for LCD, Solar, OLED and LED to each process
chamber via vacuum robot. Platform technology requires automation throughput, footprint and reliability. CNI Technology is making consistent
effort to develop the best platform on the basis of abundant experience and technology in this field.

FLETA2600™

FLETA2600™ system is designed for 2nd generation substrate.
The system consists of 3 facets to support process module, inverter
and load lock.

FLETA1600™

FLETA1600™ system is designed for wafer size ranging from 8 inch
to 12 inch. The system consists of 4 facets to support process
module and 2 VCE.