끊임없는 열정으로 항상 발전하는 씨앤아이테크놀로지가 되겠습니다.

Vacuum automation System

CNI Technology made an success in many project related to vacuum automation system based on differentiated technology.

Mask stocker

Mask stocker is a chamber to store the mask required for 8th
generation OLED process. It consists of mask cassette, up/down
module, forward/backward roller module, etc.

Buffer chamber

Buffer chamber is a chamber to maintain and adjust the interval
between substrates when 8th generation OLED substrate is
transport. The evaporation material utilization will be increased by
precisely control and reduce the distance between the substrate as
much as possible.

Load lock

This is 8th generation load lock applying fast pumping & vent and
low particle generation. In case of roller module, It is a ferro-seal
direct connecting type. So We was possible to reduce the volume
of the chamber.

Glass flipper

Glass flipper is the chamber to flip to face up or face down. It is
possible to preheat or cool the glass at the same time.

Carrier elevator

Carrier elevator is the device to load or unload the carrier interfaced
AGV or MGV. It consists of up/down module and sliding module.

Linear buffer

Linear buffer is the device that is developed to enable inline carry
from cluster tool. It consists of top linear stage, bottom linear stage,
up/down module and aligner. Because the aligner is installed to
compensate for the wrong location of glass in the change from
cluster into inline, precise carry is allowed. In addition, the
application to change pass line is allowed by applying linear buffer
to system.

OLED System

CAOS2400 series are configured to facilitate organic deposition related materials and process development.

Key Features - Substrate : ≤ 370mm x 470mm
- Consistence : LL, PT, TM, OC(3 chambers), MC, BF, GB
- Base pressure : ≤ 3E-7 Torr
- Thickness non-uniformity : ≤ ± 3%
- Mask alignment : mechanical(≤ 50 ㎛), vision auto(≤ 3 ㎛)
- Encapsulation : O2,H2O<1ppm
- UV curing, auto dispenser, vacuum assembly
- Transfer method : vacuum robot
- Full automation : PC or PLC

Platform is the tool to transfer board to process chamber in the atmosphere. It transfers the board for LCD, Solar, OLED and LED to each process
chamber via vacuum robot. Platform technology requires automation throughput, footprint and reliability. CNI Technology is making consistent
effort to develop the best platform on the basis of abundant experience and technology in this field.


FLETA2600™ system is designed for 2nd generation substrate.
The system consists of 3 facets to support process module, inverter
and load lock.


FLETA1600™ system is designed for wafer size ranging from 8 inch
to 12 inch. The system consists of 4 facets to support process
module and 2 VCE.